DISTRIBUTION OF IMPLANTED IMPURITIES AND DEPOSITED ENERGY IN HIGH-ENERGY ION-IMPLANTATION

Authors
KOMAROV FF MOZOLEVSKI IE MATSU PP ANANICH SE
Citation
Ff. Komarov et al., DISTRIBUTION OF IMPLANTED IMPURITIES AND DEPOSITED ENERGY IN HIGH-ENERGY ION-IMPLANTATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 124(4), 1997, pp. 478-483
Citations number
12
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
124
Issue
4
Year of publication
1997
Pages
478 - 483
Database
ISI
SICI code
0168-583X(1997)124:4<478:DOIIAD>2.0.ZU;2-G
Abstract
A new model of high-energy ion implantation based on the Fokker-Planck equation is proposed. An effective adaptive algorithm for the numeric al solution of the problem is developed. Simulation of implantation of B into S at energies ranging from 10 to 100 MeV was carried out. Resu lts show good agreement with experimental data and with Monte Carlo ca lculations.