A detailed study on the optical quality of atmospheric pressure metalo
rganic vapor phase epitaxy grown GaAs(1-x)N-x epilayers (on GaAs subst
rates) in which the N incorporation is accomplished using dimethylhydr
azine precursor is reported. We show here that the poor optical qualit
y of these as-grown layers can be significantly improved by carefully
planned post-growth heat treatments. Optical data are presented to dem
onstrate unambiguously that such treatments affect in no way the physi
cal properties of these metastable layers (no phase separation) and th
at the improvement of their optical quality is closely connected to th
e incorporation behavior of N in this growth method. (C) 1998 American
Institute of Physics.