KINETIC-ENERGY INFLUENCE OF HYPERTHERMAL DUAL-ION BEAMS ON BONDING AND OPTICAL-PROPERTIES OF CARBON NITRIDE FILMS

Authors
TSUBOUCHI N HORINO Y ENDERS B CHAYAHARA A KINOMURA A FUJII K
Citation
N. Tsubouchi et al., KINETIC-ENERGY INFLUENCE OF HYPERTHERMAL DUAL-ION BEAMS ON BONDING AND OPTICAL-PROPERTIES OF CARBON NITRIDE FILMS, Applied physics letters, 72(12), 1998, pp. 1412-1414
Citations number
21
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
72
Issue
12
Year of publication
1998
Pages
1412 - 1414
Database
ISI
SICI code
0003-6951(1998)72:12<1412:KIOHDB>2.0.ZU;2-9
Abstract
Carbon nitride films were produced by simultaneous irradiation of well -defined hyperthermal (50-400 eV) isotopically mass-separated C-12(2)- and N-14(+) ions with various kinetic energy combinations. It was fou nd that the intensity of CN-triple bends normalized by the amount of n itrogen atoms in the films and the complex refraction index (n,k) are correlated with the energy combination of C-12(2)-, and N-14(+) ions. (C) 1998 American Institute of Physics.