INVESTIGATION OF PHYSICAL PROCESSES IN PLD OF CERAMICS BY EXIMER LASER-RADIATION

Citation
Ew. Kreutz et al., INVESTIGATION OF PHYSICAL PROCESSES IN PLD OF CERAMICS BY EXIMER LASER-RADIATION, Surface & coatings technology, 97(1-3), 1997, pp. 85-89
Citations number
10
ISSN journal
02578972
Volume
97
Issue
1-3
Year of publication
1997
Pages
85 - 89
Database
ISI
SICI code
0257-8972(1997)97:1-3<85:IOPPIP>2.0.ZU;2-#
Abstract
A probe beam deflection technique is applied to investigate the vapour /plasma generated during material removal by laser radiation. The elec tron density and geometry of the expanding vapour/plasma are investiga ted during material removal of an Al2O3 target with pulsed excimer las er radiation. The results obtained by the beam deflection technique ar e compared with those of high-speed photography. (C) 1997 Elsevier Sci ence S.A.