PROPERTY DISTRIBUTION ON 3-DIMENSIONALLY SHAPED PVD-COATED SAMPLES

TiN coatings are deposited by magnetron sputtering on high-speed steel samples representing different three-dimensional profiles. The thickn ess and hardness distribution of the coatings is determined. Effects o f different angles of particle incidence, of static and dynamic deposi tion conditions, of the two magnetron deposition techniques, as well a s of the edge distance of wedge samples, are illustrated by the thickn ess and hardness distributions as well as by fracture micrographs. (C) 1997 Elsevier Science S.A.