The Laser-Are method represents a pulsed vacuum deposition where the a
re discharge is ignited by short laser pulses. Owing to the short burn
ing times of the single arcs, the erosion is restricted to the immedia
te neighbourhood of the ignition point, the laser focus. Hence, the ca
thode spots may be displayed on the cathode surface according to the d
isplacement of the focus position. In this way, the drawbacks of conve
ntional are technology such as local overheating and emission of micro
particles are essentially reduced. The Laser-Are has been scaled up fr
om the laboratory level to an industrial prototype. This fully compute
rized equipment allows the deposition of hydrogen-free diamond-like ca
rbon films of hardness up to 80 cpa with a growth rate of up to 0.2 mu
m min(-1). Owing to their low friction and high wear resistance, thes
e films are especially suitable for sliding elements. Such different m
aterials as alloyed and non-alloyed steels, hard metals, copper, alumi
nium alloys or brass were coated and demonstrated good adherence. The
process runs below 100 degrees C and allows the deposition on temperat
ure-sensitive materials such as polymers. New fields are opened by the
preparation of nanometer-multilayers which are performed by means of
this Laser-Are equipment without any loss in effectivity. (C) 1997 Els
evier Science S.A.