A NEW METHOD OF POWER INPUT IN BATCH SCALE PLASMA REACTORS

Authors
POLL HU SCHREITER S BOHME S
Citation
Hu. Poll et al., A NEW METHOD OF POWER INPUT IN BATCH SCALE PLASMA REACTORS, Surface & coatings technology, 98(1-3), 1998, pp. 845-847
Citations number
4
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
98
Issue
1-3
Year of publication
1998
Pages
845 - 847
Database
ISI
SICI code
0257-8972(1998)98:1-3<845:ANMOPI>2.0.ZU;2-A
Abstract
A new method of electric power input for plasma-processing batch scale applications is presented. The concept is based on electric power spl itting and rf-transformation within the vacuum chamber. The hardware f or power transformation in a low-pressure environment is realized by m odular rf-plasma sources operating with a heat storage system. Parasit ic glow discharges and arcs can be avoided using the suggested method. (C) 1998 Elsevier Science S.A.