BARRIER LAYERS ON ALUMINUM AND GOLD BY PLASMA POLYMERIZATION

Authors
OEHR C SCHINDLER B
Citation
C. Oehr et B. Schindler, BARRIER LAYERS ON ALUMINUM AND GOLD BY PLASMA POLYMERIZATION, Surface & coatings technology, 98(1-3), 1998, pp. 848-850
Citations number
NO
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
98
Issue
1-3
Year of publication
1998
Pages
848 - 850
Database
ISI
SICI code
0257-8972(1998)98:1-3<848:BLOAAG>2.0.ZU;2-#
Abstract
Plasma procedures were used for the deposition of polymer barrier laye rs that are highly cross-linked as a consequence of the molecular frag mentation of the feed gases. Plasma polymers from vinyltrimethysilan ( VTMS) as feed gas showed good protection against chemical and electroc hemical attacks on gold (against 4 M H2SO4). A combination of a plasma -VTMS primer covered by a plasma hydrocarbon layer showed good resista nce against alkaline corrosion on aluminium. (C) 1998 Published by Els evier Science S.A.