CHARACTERIZATION OF TI(NXOY) COATINGS PRODUCED BY THE ARC ION PLATINGMETHOD

The effect of oxygen addition to TIN was investigated by producing oxy nitride films with the are ion plating method. These titanium oxynitri de films were identified to be NaCl(B1) structure by XRD measurements with theta-2 theta and glancing angle methods. By increasing the conte nt of oxygen in the deposited films, the preferential orientation of t he films changed from the [111] direction to the [200] direction, and the existence of titanium ions with a higher valence, such as Ti3+ and Ti4+ as well as divalent titanium, in the deposited films was indicat ed by the change of Ti-2p photoelectron spectra. From the result on Vi ckers hardness, it was also indicated that suitable addition of oxygen to TiN is preferable to improve the hardness of the TiN films. (C) 19 98 Elsevier Science S.A.