DEPOSITION OF CVD DIAMOND ONTO ION-BEAM MODIFIED ASP-23 CUTTING TOOLS

The effect of ion implantation in high speed steel ASP 23 on chemical vapour deposition (CVD) diamond nucleation has been studied. N, C and Si have been implanted at 100-150 keV and fluences in the range from 5 x 10(17) to 2 x 10(18) ions cm(-2) Tribological measurements and dry turning tests were carried out to investigate the influence of the ion implantation on the steel. The results are compared with those of unt reated high speed steel substrates. The diamond deposition onto the io n beam modified steel substrates was carried out in a microwave plasma CVD apparatus. The substrate temperature was kept below 520 degrees C , because of the fusing temperature of the steel. By means of scanning electron microscopy, Raman spectroscopy, Auger electron spectroscopy and Rockwell indentation tests, the deposition parameters for the CVD process were optimized. It was found, that the Si implantation was adv antageous for the consecutive diamond deposition. (C) 1998 Elsevier Sc ience S.A.