DEPOSITION OF SUPERHARD AMORPHOUS-CARBON FILMS BY PULSED VACUUM-ARC DEPOSITION

The deposition of superhard amorphous carbon films demands high energi es of all impinging particles for film formation by subplantation inst ead of condensation. Such conditions may be realized by vacuum are dis charge. By using pulsed are currents and laser controlled ignition (La ser-Arc) the usual problems in are ablation of carbon targets have bee n overcome. In this way, smooth and very hard films with hardness in t he superhard range between 40 and 80 GPa have been prepared with high deposition rates comparable to conventional industrial are deposition. Due to the high ion energies, low deposition temperatures are possibl e without reducing the adherence. They are even necessary for the form ation of the diamond bonds by avoiding relaxation towards a graphitic structure. Hence, materials besides metals such as steels or aluminum, temperature-sensitive materials such as polymers have been successful ly coated with these hard layers. (C) 1998 Elsevier Science S.A.