A NOVEL LOW-COST PROCESS FOR THE DEPOSITION OF METALLIC AND COMPOUND THIN-FILMS ON PLASTICS

We describe a new sputter deposition process for the coating of polyme rs with metallic and compound wear-resistant thin films at a low vacuu m level (millibar range) and at rates higher than standard magnetron s puttering. Since no high vacuum equipment is needed, this process repr esents an inexpensive alternative to traditional coating techniques. V arious plastics like polyamide (PA) and polyetheretherketone (PEEK) ha ve successfully been coated with titanium and chromium as well as thei r oxides, nitrides and carbides. As the most promising example of wear -resistant, low-friction thin films on plastics, a detailed characteri zation of Ti-C:H films on PA is presented. Very good wear rates have b een achieved even without substrate biasing, thus reducing substrate h eating. (C) 1998 Elsevier Science S.A.