PROPERTIES OF CARBIDES, NITRIDES AND CARBONITRIDES BASED ON TI AND MOMULTICOMPONENT-LAYERS

Coating have been produced by bias activated reactive evaporation meth od (BARE) [1] on polished HSS steel and Coming glass substrates. Titan ium and molybdenum were co-evaporated using a special two-hearth elect ron gun with separate Ti and Mo evaporation sources. Various chemical compositions were obtained by means of heating time control of respect ive materials. The working gases were nitrogen, acetylene and a 1:1 mi xture of both. The investigation of properties of layers with various chemical compositions covered samples: TiC, TiCN, TiN, (Ti,Mo)C, (Ti,M o)CN, (Ti,Mo)N, MoC, MoCN, MoN. The chemical film compositions were de termined using the energy-dispersive X-ray analysis (EDAX) method, Vic kers hardness measurements were made. The structures of the deposited layers were examined by means of X-ray diffraction. The electrical mea surements of the deposited layers covered resistivity (rho) and temper ature coefficient of resistivity (TCR). It has been found that the mea surements of electrical properties may be very sensitive indicators of the layer composition and structure. (C) 1998 Published by Elsevier S cience S.A.