CERAMICS INNER COATING OF NARROW TUBES BY A COAXIAL MAGNETRON PULSED PLASMA

We have developed a double-ended anode coaxial magnetron pulsed plasma (DCMPP) for the purpose of coating fine ceramics with, for example, t itanium nitride (TiN) on the inner surface of a narrow insulated tube by reactive sputtering. In the magnetron pulsed plasma, the magnetron effect and J x B plasma transport by a pulsed discharge occurred simul taneously. Discharge characteristics and optimum conditions for unifor m and high-rate sputter-coating were investigated. By using DCMPP, gol d-colored TiN films could be deposited on the inner surfaces of narrow glass tubes of 8 mm in inner diameter and 400 mm in length. The depos ition rate was about 20 nm min(-1) for a deposition time of 600 s. By using a light absorption method, it was found that axial uniformity of the prepared films was within 25% over 400 mm. (C) 1998 Elsevier Scie nce S.A.