STRUCTURE AND PROPERTIES OF TIB2 BASED COATINGS PREPARED BY UNBALANCED DC MAGNETRON SPUTTERING

Citation
E. Kelesoglu et C. Mitterer, STRUCTURE AND PROPERTIES OF TIB2 BASED COATINGS PREPARED BY UNBALANCED DC MAGNETRON SPUTTERING, Surface & coatings technology, 98(1-3), 1998, pp. 1483-1489
Citations number
26
Categorie Soggetti
Materials Science, Coatings & Films
ISSN journal
02578972
Volume
98
Issue
1-3
Year of publication
1998
Pages
1483 - 1489
Database
ISI
SICI code
0257-8972(1998)98:1-3<1483:SAPOTB>2.0.ZU;2-J
Abstract
TiB2 coatings with thicknesses of 3 to 4 mu m were deposited by means of non-reactive unbalanced direct current (DC) magnetron sputtering us ing a TiB2 target. The intensity as well as the energy of ion bombardm ent of the growing film was varied systematically by varying the exter nal magnetic field supplied via a Helmholtz coil system and the bias p otential. Deposition conditions with less intense ion bombardment resu lted in the formation of fine-grained coating structures consisting of the TIB2 phase with (100) texture and hardness values of 2200 HV0.01. Increases in the energy and intensity of ion bombardment caused grain refinement and a shift of the preferred orientation to (001). Maximum hardness values of up to 6900 HV0.01 were observed for intense bombar dment with energetic argon ions. The friction coefficient during dry s liding against carbon steel was determined to vary between 0.50 and 0. 65 as a result of the formation of coating chips acting as abrasive pa rticles. (C) 1998 Elsevier Science S.A.