E. Kelesoglu et C. Mitterer, STRUCTURE AND PROPERTIES OF TIB2 BASED COATINGS PREPARED BY UNBALANCED DC MAGNETRON SPUTTERING, Surface & coatings technology, 98(1-3), 1998, pp. 1483-1489
TiB2 coatings with thicknesses of 3 to 4 mu m were deposited by means
of non-reactive unbalanced direct current (DC) magnetron sputtering us
ing a TiB2 target. The intensity as well as the energy of ion bombardm
ent of the growing film was varied systematically by varying the exter
nal magnetic field supplied via a Helmholtz coil system and the bias p
otential. Deposition conditions with less intense ion bombardment resu
lted in the formation of fine-grained coating structures consisting of
the TIB2 phase with (100) texture and hardness values of 2200 HV0.01.
Increases in the energy and intensity of ion bombardment caused grain
refinement and a shift of the preferred orientation to (001). Maximum
hardness values of up to 6900 HV0.01 were observed for intense bombar
dment with energetic argon ions. The friction coefficient during dry s
liding against carbon steel was determined to vary between 0.50 and 0.
65 as a result of the formation of coating chips acting as abrasive pa
rticles. (C) 1998 Elsevier Science S.A.