An industrial PaCVD-plant was equipped with an AlCl3-generator. By usi
ng Ar, H-2, N-2, CH4, TiCl4 and AlCl3, TiAlN- and TiAlCN-films could b
e deposited on hard metal and steel substrates. The plasma was generat
ed by a DC-pulse power supply with frequencies up to 50 kHz. The react
or size was 350 mm in diameter and 900 mm in height. During one batch
1200 indexable inserts could be coated. The growth rates were about 1-
3 mu m h(-1). The deposited films show a fine structure and Cl-concent
rations below 3%. The measured critical loads were between 30 and 40 N
. Wear test results show an increase in tool life up to several 100% c
ompared with uncoated or TiN-coated tools. (C) 1998 Elsevier Science S
.A.