Capacitively coupled RF discharge in oxygen is investigated for polyme
r surface modification. The discharge is studied by means of ion analy
sis at the powered and grounded discharge electrode, optical emission
spectroscopy and Langmuir probe measurements. Correlations are shown b
etween discharge properties, internal plasma parameters and the surfac
e modification of polyethylene (PE) and polystyrene (PS) characterized
by FTIR (ATR) spectroscopy and ellipsometry. (C) 1998 Elsevier Scienc
e S.A.