A 6-COMPONENT SILICON MICRO FORCE SENSOR

Authors
JIN WL MOTE CD
Citation
Wl. Jin et Cd. Mote, A 6-COMPONENT SILICON MICRO FORCE SENSOR, Sensors and actuators. A, Physical, 65(2-3), 1998, pp. 109-115
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
65
Issue
2-3
Year of publication
1998
Pages
109 - 115
Database
ISI
SICI code
0924-4247(1998)65:2-3<109:A6SMFS>2.0.ZU;2-7
Abstract
A six-component micro force sensor has been developed using silicon mi cromachining technology. The sensing and elastic elements of the senso r are fabricated separately through bulk silicon machining processes a nd bonded together using a Si-Au eutectic bonding technique. Calibrati on of the sensor is undertaken using Lorentz forces. High resolution a nd satisfactory linearity of the outputs of the sensor are obtained. ( C) 1998 Published by Elsevier Science S.A.