We report STM-induced desorption of H from Si(100)-H(2 X 1) at negativ
e sample bias. The desorption rate exhibits a power-law dependence on
current and a maximum desorption rate at -7 V. The desorption is expla
ined by vibrational heating of H due to inelastic scattering of tunnel
ing holes with the Si-H 5 sigma hole resonance. The dependence of deso
rption rate on current and bias is analyzed using a novel approach for
calculating inelastic scattering, which includes the effect of the el
ectric field between tip and sample. We show that the maximum desorpti
on rate at -7 V is due to a maximum fraction of inelastically scattere
d electrons at the onset of the field emission regime.