A vapour phase doping of ZnSe single crystals by In impurity during a
growth process at T = 1180 degrees C was developed. A liquid phase dop
ing was performed by means of annealing of crystal wafers in liquid Zn
with an addition of In or Al at T = 900 degrees C. Atomic-emission an
alysis, cathodoluminescence study, specific resistance and Hall measur
ements were carried out. The concentration of the In and Al impurities
in ZnSe single crystals were in a range from 10(17) to 10(19) cm(-3)
High n-type conductivity in the ZnSe single crystals doped by In or Al
impurities was achieved: the specific resistance was as low as 0.05 O
mega cm for the Al liquid phase doping and about 1 Omega cm for the In
vapour phase doping followed by annealing in the liquid Zn:In. (C) 19
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