Vi. Erofeev et Nv. Kovalenko, NUMERICAL-STUDIES OF MULTILAYER GRATINGS USING THE METHOD OF EIGENVECTORS, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 405(2-3), 1998, pp. 305-309
The method of eigenvectors has been adapted for numerical studies of l
amellar multilayer gratings with a partially etched multilayer stack (
phase multilayer gratings). Unlike the existing modal and differential
methods, this method can be applied to thick multilayer gratings with
a small grating period, and also to the case of grazing incidence of
radiation. For the case of soft X-rays, the reciprocity curves have be
en obtained for different numbers of etched bilayers in a multilayer s
tructure using this method. The numerical calculations based on the pr
oposed method were used to interpret the experimental data on diffract
ion properties of the Ni/C multilayer grating.