NUMERICAL-STUDIES OF MULTILAYER GRATINGS USING THE METHOD OF EIGENVECTORS

The method of eigenvectors has been adapted for numerical studies of l amellar multilayer gratings with a partially etched multilayer stack ( phase multilayer gratings). Unlike the existing modal and differential methods, this method can be applied to thick multilayer gratings with a small grating period, and also to the case of grazing incidence of radiation. For the case of soft X-rays, the reciprocity curves have be en obtained for different numbers of etched bilayers in a multilayer s tructure using this method. The numerical calculations based on the pr oposed method were used to interpret the experimental data on diffract ion properties of the Ni/C multilayer grating.