REFLECTOMETER FOR PRECISION TESTS OF OPTICAL-COMPONENTS IN THE ULTRASOFT X-RAY RANGE

Authors
CHKHALO NI KIRPOTIN AN KRUGLYAKOV EP SEMENOV EP
Citation
Ni. Chkhalo et al., REFLECTOMETER FOR PRECISION TESTS OF OPTICAL-COMPONENTS IN THE ULTRASOFT X-RAY RANGE, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 405(2-3), 1998, pp. 393-395
Citations number
5
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
405
Issue
2-3
Year of publication
1998
Pages
393 - 395
Database
ISI
SICI code
0168-9002(1998)405:2-3<393:RFPTOO>2.0.ZU;2-O
Abstract
The design of a reflectometer for testing optical components within th e range of 0.7-120nm is described. The reflectometer covers all scanni ng regimes with a minimum step in theta of 9 angular seconds. The spec imen can be moved across the X-ray beam within the limits of +/-7.5 cm . The design of the apparatus envisages keeping the position of goniom eter zeros after vacuum pumping. The reflectometer is designed for the study of diffraction gratings, and multilayer and grazing incident X- ray mirrors.