DEEP X-RAY-LITHOGRAPHY BEAMLINE AT THE KURCHATOV SYNCHROTRON-RADIATION SOURCE - FIRST RESULTS

Authors
ARTEMIEV AN BUSHEVA IN KOLYASNIKOV VA KOVACHOV GA LATISH OE MARTYNENKO VV MORYAKOV VP NIKITIN BI ODINTSOV DG PEREDKOV SS RAKHIMBABAEV TY STANKEVITCH VG TZVID ES SCHMIDT A FEIERTAG B
Citation
An. Artemiev et al., DEEP X-RAY-LITHOGRAPHY BEAMLINE AT THE KURCHATOV SYNCHROTRON-RADIATION SOURCE - FIRST RESULTS, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 405(2-3), 1998, pp. 496-499
Citations number
4
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
405
Issue
2-3
Year of publication
1998
Pages
496 - 499
Database
ISI
SICI code
0168-9002(1998)405:2-3<496:DXBATK>2.0.ZU;2-L
Abstract
A Deep X-ray Lithography (DXRL) beamline at the Kurchatov Synchrotron Radiation Source (KSRS) has been constructed and commissioned. For the irradiation a simple exposure apparatus and synchrotron radiation wit h a critical energy of about 7 keV was used. Samples with resist thick ness of 300 mu m and 500 mu m have been exposed using a test mask. SEM results are shown.