NEW METHOD OF CALCULATING THE CORRECTION FACTORS FOR THE MEASUREMENT OF SHEET RESISTIVITY OF A SQUARE SAMPLE WITH A SQUARE 4-POINT PROBE

Authors
SHI JS SUN YC
Citation
Js. Shi et Yc. Sun, NEW METHOD OF CALCULATING THE CORRECTION FACTORS FOR THE MEASUREMENT OF SHEET RESISTIVITY OF A SQUARE SAMPLE WITH A SQUARE 4-POINT PROBE, Review of scientific instruments, 68(4), 1997, pp. 1814-1817
Citations number
5
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
68
Issue
4
Year of publication
1997
Pages
1814 - 1817
Database
ISI
SICI code
0034-6748(1997)68:4<1814:NMOCTC>2.0.ZU;2-8
Abstract
The finite element method was employed to calculate the correction fac tors for the measurement of sheer resistivity of a square sample with a square four-point probe. This method is simpler than methods of imag e and conformal transformation, and can be used for calculating the co rrection factors for four-point resistivity measurement of an arbitrar ily shaped sample with an arbitrary four-probe array. (C) 1997 America n Institute of Physics.