MAGNETIC-RESONANCE FORCE DETECTION AND SPECTROSCOPY OF ELECTRON SPINSIN PHOSPHORUS-DOPED SILICON

Electron spin resonance (ESR) of phosphorus-doped silicon was detected using a low temperature magnetic resonance force microscope (MRFM). F orce-detected ESR spectra were obtained using an amplitude or frequenc y modulated microwave field to cyclically saturate the spin magnetizat ion. For a sample containing 4 X 10(18) phosphorus atoms/cm(3), a sing le strong ESR line was observed. For a sample containing 8 X 10(16) ph osphorus atoms/cm(3), a pair of lines split by the 42 G P-31 hyperfine interaction was observed. This result demonstrates the possibility of using MRFM techniques for spectroscopic purposes. (C) 1997 American I nstitute of Physics.