EFFECT OF THE INITIAL CHARGE AND CHARGE-STATE FLUCTUATIONS ON THE RANGE PARAMETERS OF HIGH-ENERGY IONS

A model used in calculating the depth distribution of implanted atoms, and the energy released into the electron and nuclear subsystems of t he solid is studied. It takes into account the initial charge and the fluctuations of charge states of high-energy ions with energies E grea ter than or equal to 1 MeV amu(-1). The results of calculations are ob tained on the basis of solutions of transport equations. Satisfactory agreement between theoretical predictions and experimental results is observed for a broad class of ion-target systems. (C) 1998 American In stitute of Physics.