DISSOCIATION OF CHLORINE MOLECULES IN A GLOW-DISCHARGE PLASMA IN MIXTURES WITH ARGON, OXYGEN, AND NITROGEN

The influence of argon, oxygen, and nitrogen admixtures on the dissoci ation of Cl-2 molecules in a glow discharge plasma was investigated. F or Cl-2-Ar mixture, the concentration of chlorine atoms was observed t o be constant at argon concentrations up to 50%. This invariability is explained by relative increase in rate of direct dissociation because of change in electrophysical parameters of plasma. For all the consid ered mixtures, the contribution of stepwise dissociation involving act ive species from gas additives was found to be negligible.