THERE AND BACK AGAIN

Authors
BONORA A
Citation
A. Bonora, THERE AND BACK AGAIN, Solid state technology, 40(5), 1997, pp. 141
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
40
Issue
5
Year of publication
1997
Database
ISI
SICI code
0038-111X(1997)40:5<141:TABA>2.0.ZU;2-V
Abstract
Clean manufacturing technology has gone full circle, starting out with localized clean zones, developing into immense, multilevel global cle an environments, and returning once more to local clean zones with tod ay's minienvironments and SMIF technology.