SOL-GEL HYBRID GLASS DIFFRACTIVE ELEMENTS BY DIRECT ELECTRON-BEAM EXPOSURE

Authors
RANTALA JT NORDMAN N NORDMAN O VAHAKANGAS J HONKANEN S PEYGHAMBARIAN N
Citation
Jt. Rantala et al., SOL-GEL HYBRID GLASS DIFFRACTIVE ELEMENTS BY DIRECT ELECTRON-BEAM EXPOSURE, Electronics Letters, 34(5), 1998, pp. 455-456
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
34
Issue
5
Year of publication
1998
Pages
455 - 456
Database
ISI
SICI code
0013-5194(1998)34:5<455:SHGDEB>2.0.ZU;2-K
Abstract
The authors propose and demonstrate direct electron-beam writing of su rface relief diffractive elements into hybrid inorganic/organic sol-ge l glass films. The etch depth and phase delay can be controlled by the electron dose. The potential applications include multi-phase-level d iffractive elements and apodised planar waveguide gratings.