XPS, XRD and other techniques were used to study the phase, compositio
n and valence states of W and O ions of electrochromic (EC) WOx films
prepared by DC magnetron reactive sputtering. The XRD results indicate
that different EC WOx films consist of different phases and compositi
ons. XPS results reveal that W6+, W5+ and W4+ ions coexist in colored
WOx films, but only W6+ ions are detected in bleached WOx films. The b
inding energy and the relative content of the O Is peaks of WOx films
are very different for the bleached and colored states. (C) 1998 Elsev
ier Science S.A.