Ks. Mogensen et al., A PARAMETRIC STUDY OF THE MICROSTRUCTURAL, MECHANICAL AND TRIBOLOGICAL PROPERTIES OF PACVD TIN COATINGS, Surface & coatings technology, 99(1-2), 1998, pp. 140-146
In order to design coatings with optimal wear and corrosion performanc
e, knowledge of the structures and properties of the coatings and thei
r dependence on the process parameters is required. Coatings of TiN de
posited onto tool steels using an industrial, pulsed DC plasma-assiste
d chemical vapour deposition chamber were investigated. The process pa
rameters, i.e, voltage, pressure, and flows of H-2, Ar, N, and TiCl4,
were varied. The microstructural, mechanical and tribological properti
es of the coatings were investigated using X-ray diffraction, scanning
electron microscopy, transmission electron microscopy, nanoindentatio
n, pin-on-disc measurements and Rutherford backscattering spectrometry
. The residual stress level and hardness varied significantly with cha
nges in the process parameters, whereas the tribological properties di
splayed only minor variations. (C) 1998 Elsevier Science S.A.