PRODUCTION AND WETTING PROPERTIES OF FLUORINATED DIAMOND-LIKE CARBON COATINGS

Citation
Rs. Butter et al., PRODUCTION AND WETTING PROPERTIES OF FLUORINATED DIAMOND-LIKE CARBON COATINGS, Thin solid films, 311(1-2), 1997, pp. 107-113
Citations number
35
Journal title
ISSN journal
00406090
Volume
311
Issue
1-2
Year of publication
1997
Pages
107 - 113
Database
ISI
SICI code
0040-6090(1997)311:1-2<107:PAWPOF>2.0.ZU;2-7
Abstract
The control of hydrophobicity of diamond-like carbon (DLC) surfaces ha s been studied by the use of CF4 etching plasma and by the deposition of fluorinated DLC (a-C:F) using mixtures of CF4 with butane and acety lene. The results indicate that the degree of fluorination (F:C ratio) , and the hydrophobicity of the surface depend critically on both the elemental composition of the gas feedstock and the deposition paramete rs. There is a correlation between high levels of fluorination and hyd rophobicity, although at high F:C ratios, the mechanical stability of the fluorinated surface may be compromised. A possible mechanism for t he production of hydrophobic fluorinated surfaces is proposed. (C) 199 7 Elsevier Science S.A.