The control of hydrophobicity of diamond-like carbon (DLC) surfaces ha
s been studied by the use of CF4 etching plasma and by the deposition
of fluorinated DLC (a-C:F) using mixtures of CF4 with butane and acety
lene. The results indicate that the degree of fluorination (F:C ratio)
, and the hydrophobicity of the surface depend critically on both the
elemental composition of the gas feedstock and the deposition paramete
rs. There is a correlation between high levels of fluorination and hyd
rophobicity, although at high F:C ratios, the mechanical stability of
the fluorinated surface may be compromised. A possible mechanism for t
he production of hydrophobic fluorinated surfaces is proposed. (C) 199
7 Elsevier Science S.A.