THE DEPOSITION OF DIAMOND FILM WITH HIGH THERMAL-CONDUCTIVITY

In this paper, the main factors influencing thermal conductivity of di amond film were analyzed in theory. The thermal conductivity of diamon d film was measured by means of the photothermal deflection method, Va rious crystal structures of diamond films were obtained by synthesis w ith various deposition methods and conditions. Diamond films synthesiz ed under lower concentration of methane and technique of annealing by MWPCVD method have higher thermal conductivity. Thermal conductivity o f diamond film increases with the increasing of removal thickness for the SiC layer on the back of the film. (100)-oriented diamond thick fi lms have higher thermal conductivity. (C) 1997 Elsevier Science S.A.