We determine the resistivity of small micrometer-sized conductors with
arbitrary shapes. It is shown that with n terminals attached to the s
ample, there are n(n-1)/2 independent measurements of the resistance t
hat can be made; from which the sample resistivity and the contact res
istances can be extracted. An image of the sample is digitized and a f
inite element analysis is used to determine the geometrical factors th
at arise from the nonuniform current flow and hence control the resist
ance measurements. It is shown that all the elements of the resistance
matrix for the sample are generated from the diagonal elements alone
for an Ohmic sample, which provide a useful check of the experimental
resistance measurements. To illustrate this approach, micrometer-sized
diamond crystallites with four terminals were used, and the sample re
sistivity and the contact resistances extracted. This technique is a p
ractical example of an inverse problem.