CAD TOOLS AND FOUNDRIES TO BOOST MICROSYSTEMS DEVELOPMENT

Authors
COURTOIS B KARAM JM LUBASZEWSKI M SZEKELY V RENCZ M HOFMANN K GLESNER M
Citation
B. Courtois et al., CAD TOOLS AND FOUNDRIES TO BOOST MICROSYSTEMS DEVELOPMENT, Materials science & engineering. B, Solid-state materials for advanced technology, 51(1-3), 1998, pp. 242-253
Citations number
22
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
51
Issue
1-3
Year of publication
1998
Pages
242 - 253
Database
ISI
SICI code
0921-5107(1998)51:1-3<242:CTAFTB>2.0.ZU;2-X
Abstract
This paper deals with CAD, testing and manufacting of microsystems (mi croelectromechanical systems). Both existing tools and research areas are addressed. All through the paper. similarities between the present development of microsystems and the development of microelectronics d ecades ago are pointed out: the migration from point tools to CAD fram eworks, testing, prototyping facilities, foundries/fabless business, i ntellectual property issues. Specific aspects such as thermal issues a nd testing are also addressed. (C) 1998 Elsevier Science S.A. All righ ts reserved.