CHARACTERIZATION OF A LOW-VOLTAGE ACTUATED GOLD MICROSWITCH

Authors
ATTIA P TREMBLAY G LAVAL R HESTO P
Citation
P. Attia et al., CHARACTERIZATION OF A LOW-VOLTAGE ACTUATED GOLD MICROSWITCH, Materials science & engineering. B, Solid-state materials for advanced technology, 51(1-3), 1998, pp. 263-266
Citations number
7
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
51
Issue
1-3
Year of publication
1998
Pages
263 - 266
Database
ISI
SICI code
0921-5107(1998)51:1-3<263:COALAG>2.0.ZU;2-R
Abstract
Gold microstructures were fabricated and electrostatically driven to d emonstrate the feasibility of a low-voltage actuated microswitch. The structures, composed of a deflectable cantilever microbeam, two latera l driving electrodes and a working part, are manufactured using a micr ormachining technique with a single mask. Both static and dynamic beha viours of the device are presented. Young's modulus and the ageing of the structures are also estimated. (C) 1998 Elsevier Science S.A. All rights reserved.