In this paper we study the imaging process of atomic-size and extended
modifications in WSe2 by taking spectroscopic data. Due to the soft c
haracter of layered materials, the tip-sample interaction plays an imp
ortant role in STM. Therefore, we have carefully analysed the distance
and bias voltage dependence of the tunneling current on bare and modi
fied regions. From this data, we conclude that atomic-size topographic
defects could be imaged as extended structures, though a local change
in the electronic properties could produce similar results. On atomic
-size structures the spectroscopic measurements reveal a change in the
electronic structure of the modified areas. The shape of these ''trim
er'' structures could be due to a change in the tungsten atom position
. (C) 1998 Elsevier Science B.V.