Sj. Splinter et Ns. Mcintyre, RESOLUTION ENHANCEMENT OF X-RAY PHOTOELECTRON-SPECTRA BY MAXIMUM-ENTROPY DECONVOLUTION, Surface and interface analysis, 26(3), 1998, pp. 195-203
The maximum entropy method (MEM) is applied to the deconvolution of x-
ray photoelectron spectra. This method provides the least-biased estim
ate of the unbroadened spectrum by using the Shannon information conte
nt as the regularizing functional. The large-scale, non-linear optimiz
ation problem is solved using a robust variable metric sequential-quad
ratic programming (SQP) algorithm implemented on a personal computer (
PC). The program is tested on simulated spectra and then shown to prov
ide reliable resolution enhancement of measured spectra by unfolding a
measured instrumental resolution function. Typical resolution enhance
ments of 50% are achievable in <15 min of computer time. (C) 1998 John
Wiley & Sons, Ltd.