High quality c-axis oriented HgBa2CaCu2O6+delta thin films have been g
rown epitaxially on SrTiO3 substrates with the a-axis of the film alig
ned with the (100)-axis of the substrates. The film-substrate interfac
e quality can be greatly improved by using a fast temperature ramping
Hg-vapor annealing process (FTRA). Zero-resistance T-c values above 12
0 K are routinely obtained for FTRA processed HgBa2CaCu2O6+delta thin
films.