THERMAL DEPOSITION AND CHARACTERIZATION OF SE-SN MIXED-OXIDE THIN-FILMS FOR NO GAS-SENSING APPLICATIONS

Authors
MANNO D MICOCCI G SERRA A TEPORE A
Citation
D. Manno et al., THERMAL DEPOSITION AND CHARACTERIZATION OF SE-SN MIXED-OXIDE THIN-FILMS FOR NO GAS-SENSING APPLICATIONS, Journal of applied physics, 83(7), 1998, pp. 3541-3546
Citations number
17
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
83
Issue
7
Year of publication
1998
Pages
3541 - 3546
Database
ISI
SICI code
0021-8979(1998)83:7<3541:TDACOS>2.0.ZU;2-N
Abstract
Thin films made by a mixing of selenium and tin oxides have been obtai ned by high vacuum thermal evaporation. A detailed optical, electrical and structural characterization has been performed on all deposited f ilms. Electron microscopy observations show that the films consist of nanosized grains of SeO2 and SnO2 homogeneously arranged. The NO gas s ensing properties of this material have been tested in controlled atmo sphere. In addition, the influence of oxygen in the test gas mixture w as analyzed. (C) 1998 American Institute of Physics. [S0021-8979(98)06 505-0].