S. Chattopadhyay et al., SYNTHESIS OF ORIENTED THIN-FILMS OF FERROELECTRIC SBNBO4 ON SI BY PULSED-LASER ABLATION, Journal of applied physics, 83(7), 1998, pp. 3911-3913
The stibiotantalite family includes a number of ferroelectrics and ant
iferroelectrics with excellent potential for applications. We report t
he deposition of phase-pure, oriented thin films of SbNbO4 on Si(100)
substrates using pulsed laser ablation. The deposition conditions were
optimized with respect to substrate temperature, laser parameters, an
d the ambient oxygen pressure. The films were characterized by x-ray d
iffraction and electron microprobe analysis, while their microstructur
e was studied by atomic force microscopy and scanning electron microsc
opy. Dielectric studies indicated that these films are ferroelectric w
ith a T-C congruent to 500 degrees C and epsilon(max)congruent to 200.
(C) 1998 American Institute of Physics. [S0021-8979(98)01107-4].