Experimental spectra of the Yb-169 conversion lines having kinetic ene
rgies of 3.7-18.4 keV and the beta spectrum from the decay of Pu-241 a
re compared with calculations by the Monte Carlo method which take int
o account the individual elastic and inelastic scattering processes of
the electrons ire the source, in the substrate, and in a carbon layer
contaminating the source. Good agreement is obtained between the theo
retical and experimental results. It is also shown that the scattering
of the electrons depends on their emission angle.