S. Umemura et al., WEAR DURABILITY AND ADHESION EVALUATION METHODS FOR ULTRATHIN OVERCOAT FILMS BY ATOMIC-FORCE MICROSCOPY, IEICE transactions on electronics, E81C(3), 1998, pp. 337-342
A method has been developed for evaluating the wear durability and adh
esion characteristics of ultrathin overcoat films. The relationship be
tween the wear depth and applied load or between the wear depth and nu
mber of scanning-scratch cycles is used in AFM nanowear tests. Inheren
t wear durability, which is independent of adhesion or substrate hardn
ess, can be evaluated from the relationship between wear depth and app
lied load at relatively low loads, and the adhesion characteristics ca
n be evaluated from the relationship at relatively high loads. Wear du
rability can be evaluated with a small number of scanning-scratch cycl
es and adhesion with a large number of cycles.