SPUTTERING YIELDS OF YBA2CU3O7 AND BI2SR2CA2CU3O10 BY 100 KEV AR+ IMPACT AT NORMAL INCIDENCE

Authors
MATSUNAMI N
Citation
N. Matsunami, SPUTTERING YIELDS OF YBA2CU3O7 AND BI2SR2CA2CU3O10 BY 100 KEV AR+ IMPACT AT NORMAL INCIDENCE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 134(3-4), 1998, pp. 346-351
Citations number
17
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
134
Issue
3-4
Year of publication
1998
Pages
346 - 351
Database
ISI
SICI code
0168-583X(1998)134:3-4<346:SYOYAB>2.0.ZU;2-5
Abstract
The thickness change of YBa2Cu3O7-delta (YBCO) and Bi2Sr2Ca2Cu3O10-del ta (Bi-2223) films by 100 keV Ar+ impact at normal incidence has been measured using 1.8 MeV He Rutherford backscattering method. The sputte ring yields of YBCO and Bi-2223 films are determined as 2.5 and 1.7 at oms per ion, respectively. A considerable segregation of Y is observed for YBCO by ion impact. Comparing the experimental sputtering yields with those of a computer simula tion, the effective surface binding en ergies fur the films of non-superconducting phase are obtained as 3.0 and 4.5 eV for YBCO and Bi-2223, respectively. These surface binding e nergies are compared with those of thermodynamics. (C) 1998 Elsevier S cience B.V.