A microchip module with integrated flow channel and highly sensitive t
hin-film thermoelements of Bi0.87Sb0.13 and Sb was developed in order
to realize a microcalorimeter for small volumes and flows in the mu l
and mu l/min range, respectively. It was designed according to the pri
nciple of flow-injection analysis (FIA) and prepared using means of mi
cromachining technology The how channel comprises two inlets, a mixing
region, a measurement region and one outlet. In this way, the initiat
ion of chemical reactions by interdiffusion takes place in the closest
possible contact with the sensing elements. Three thermopiles (i.e. t
hermoelements connected in series) an arranged on a thin-film membrane
covering the fluid channel. A thin-film heater of an NiCr alloy is in
tegrated for internal electrical calibration. The microreactor was fir
st tested in the neutralization reaction between sodium hydroxide and
sulphuric acid for different NaOH concentrations, flows, and sample vo
lumes, investigating for the present the integral signal of the three
thermopiles connected in series. From the collected data, the minimum
detectable power, minimum detectable NaOH concentration, and the react
ion enthalpy were calculated. The results characterize the module as a
sensitive chip calorimeter, showing the suitability of the micromachi
ning technology for calorimetry. (C) 1998 Elsevier Science B.V.