THIN-FILM AC-DC CONVERTER WITH THERMORESISTIVE SENSING

New thermal converter designs for accurate alternating ac-dc transfer are realized in thin-film design of heaters and aluminum thermoresisti ve temperature sensors deposited on a thin dielectric membrane. Low ma ss heater/sensor configuration assures minimal thermal inertia, so as to reduce settling time and speed up ac-dc transfer. An optional silic on obelisk serves as a thermal integrator to avoid low-frequency sc-de transfer differences. This design is enhanced by isothermal operation and transfers only slightly more slowly than the standard configurati on without the obelisk. The thermoresistive design has an improved sig nal-to-noise ratio (SNR) compared to thermal converters using thermoco uples and lowers the manufacturing cost of thermal converters.