STUDY OF THE REPRODUCIBILITY OF THE OUTPUT PARAMETERS OF MULTILAYER DIELECTRIC SYSTEMS DURING FABRICATION

Authors
BALYSHEV KV PUTILIN ES STAROVOITOV SF
Citation
Kv. Balyshev et al., STUDY OF THE REPRODUCIBILITY OF THE OUTPUT PARAMETERS OF MULTILAYER DIELECTRIC SYSTEMS DURING FABRICATION, Journal of optical technology, 65(3), 1998, pp. 207-210
Citations number
1
Categorie Soggetti
Optics
Journal title
Journal of optical technology → ACNP
ISSN journal
10709762
Volume
65
Issue
3
Year of publication
1998
Pages
207 - 210
Database
ISI
SICI code
1070-9762(1998)65:3<207:SOTROT>2.0.ZU;2-U
Abstract
This paper presents the main results of a study of the stability of th e spectral characteristics of multilayer thin-film elements against po ssible variations of the optical thickness and refractive index of the individual layers during deposition. Theoretical methods of solving t he problem are discussed, and practical recommendations are given. (C) 1998 The Optical Society of America.