In this paper we describe the preparation, microstructure, and x-ray e
xcited luminescence of vapor-deposited CaWO4 films up to about 50 mu m
thick, comparing them to particulate CaWO4 phosphor screens, used in
medical diagnostic imaging. Films that we e-beam evaporated on substra
tes heated at or above 500 degrees C were polycrystalline with the sch
eelite structure, while on unheated substrates, films were initially a
morphous but became crystalline after annealing them in air above abou
t 750 degrees C. Crystalline CaWO4 films irradiated with x-rays produc
ed light emission peaked at 430 nm. The emission intensity depended on
film thickness and grain size and was comparable to particulate CaWO4
phosphor screens. Because the vapor-deposited films also exhibited su
perior resolution, they are promising for diagnostic x-ray imaging.