Monolayers that are bonded via a covalent Si-C bond are prepared on a
silicon(100) surface by reaction of a 1-alkene with the hydrogen-termi
nated silicon surface. The monolayers have been analyzed by infrared s
pectroscopy, X-ray reflectivity, and water contact angle measurements
and display a remarkably high thermal stability. The reaction also wor
ks well for omega-functionalized 1-alkenes, provided that the function
al group is properly protected. After formation of the monolayer, the
protecting group can be easily removed without noticeable disturbance
of the monolayer integrity, and the now reactive sites at the monolaye
r can be used for further functionalization, as has been shown in the
case of ester-protected alcohol and carboxylic acids. Functional group
s that are too close to the alkene moiety interfere with monolayer for
mation and yield disordered monolayers.