The self-compensation effect leading to limitations in free carrier de
nsity rise with increasing dopant contents in CdTe was studied. Using
the radiotracer technique, diffusivity, solubility and high-temperatur
e electrical properties' measurements, dopant self-compensation was ob
served in CdTe doped with Tn(Cu, Ge or Sn). The results are discussed
in the framework of Kroger's point defect quasichemical reactions theo
ry. Four theoretically possible types of dopant self-compensation are
derived.